Silicon anodization as a structuring technique : literature review, modeling and experiments
Ivanov, Alexey
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.
Abstract: Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime.
Abstract: Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime.
Kategori:
Tahun:
2018
Penerbit:
Springer Vieweg
Bahasa:
english
Halaman:
335
ISBN 10:
3658192380
ISBN 13:
9783658192389
File:
PDF, 10.18 MB
IPFS:
,
english, 2018
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